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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 5: Microscopy and Spectroscopy with X-rays, Ions and Positrons (joint session KFM/CPP)

KFM 5.2: Vortrag

Montag, 16. März 2020, 15:20–15:40, TOE 317

Latest developments in multi-modal scanning X-ray microscopy — •Michael Stuckelberger — DESY, 22607 Hamburg, Germany

Scanning X-ray microscopy is challenged not only by the ever-smaller structures requiring higher resolution, but also by the increasing complexity of in-situ and operando environments of functional materials. Given that relevant information about micro- and nanostructures is typically extracted from the point-by-point correlation of different properties, the same spot needs to be in the same condition for all measurements. Often, this is not possible without the simultaneous evaluation of all critical measurement modalities.

At the leading X-ray nanoprobe endstations in the US and in Europe, we have set up experiments for multi-modal X-ray microscopy. Involving up to 5 different modalities, the measurements allow the simultaneous evaluation of composition by X-ray fluorescence, structure by X-ray diffraction and ptychography, and of the electrical and optical performance by X-ray beam induced current and X-ray excited optical luminescence.

In this contribution, we will demonstrate the application of multi-modal scanning X-ray microscopy to nanoscale semiconductors and electronic devices, and discuss detector arrangement and compatibility with different scan modes and samples. Beyond state-of-the-art measurements, we will give an outlook to new opportunities and challenges at X-ray nanoprobe endstations of 4th generation synchrotrons that will see light in the coming years.