Dresden 2020 – scientific programme

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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 5: Microscopy and Spectroscopy with X-rays, Ions and Positrons (joint session KFM/CPP)

KFM 5.6: Talk

Monday, March 16, 2020, 17:00–17:20, TOE 317

Detection system for transmission imaging in helium ion microscope — •Eduardo Serralta¹, Nico Klingner¹, Olivier De Castro², Serge Duarte Pinto³, Cecilia Bebeacua⁴, Stefan Findeisen¹, Olivier Bouton², Tom Wirtz², and Gregor Hlawacek¹ — ¹Helmholz-Zentrum Dresden-Rossendorf, Dresden, Germany — ²Luxembourg Institute of Science and Technology, Esch-sur-Alzette, Luxembourg — ³Photonis Netherlands B.V, Roden, Netherlands — ⁴Eidgenössische Technische Hochschule, Zürich, Switzerland

Transmission imaging in the helium ion microscope allows to measure mass-thickness contrast and reveal crystallographic information. We recently customized a microchannel plate followed by a delay line readout structure especially for this application. This system can correlate the scanning transmission ion image to the angular distribution of the transmitted ions. An in-vacuum linear support is used to place the detector at different distances from the sample, adjusting the maximum collection angle. Post-processing allows the reconstruction of images for selected scattering angles. The first results show images with nanometer resolution, material contrast, and identification of sub-surface features in biological tissues. This work has been supported by the H2020 Project npSCOPE under grant number 720964.