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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 6: Diamond

KFM 6.4: Vortrag

Dienstag, 17. März 2020, 10:50–11:10, TOE 317

Fabrication of Thin Monocrystalline Diamond Membranes — •Julia Heupel, Johann Peter Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics, Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

Due to its exceptional physical and chemical characteristics, diamond in a form of thin membranes is a particularly promising material for the fabrication of high quality photonic devices with envisioned applications in quantum information technologies (QIT). In this work we report on the structuring process of thin monocrystalline diamond (MCD) membranes, with a thickness of a few microns and rms roughness values in the range of 0.5-0.6 nm (on a 5 x 5 µm area), by means of inductively coupled plasma reactive ion etching (ICP RIE). A diamond bulk mask was utilized as an etch mask during the fabrication, featuring distinct hole diameters with angled sidewalls to avoid trenches and cracks at the edges of the membrane. Besides an examination of different mask diameters on the resulting morphology and etch quality of the membranes, differing etching mixtures and arrangements were tested to minimize the micro-masking, which can lead to pit structures and hence to an enhanced roughness of the membrane.