Dresden 2020 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 123: Nanostructured Surfaces and Thin Films III: Dots, Particles, Clusters (joint session O/CPP)

O 123.2: Vortrag

Freitag, 20. März 2020, 10:45–11:00, WIL B321

Synthesis of 3D ZnO nanostructures on different substrates for gas sensor applications — Hanaa Seso, Stefan Ostendorp, •Martin Peterlechner, and Gerhard Wilde — Institute of Materials Physics, Westfälische-Wilhelms-Universität, Wilhelm-Klemm-Str.10, 48149 Münster, Germany

Three-dimensional (3D) ZnO nanostructures have been synthesized via atomic layer deposition (ALD) on different types of templates to act as a gas sensing active material. The used template structures range from anodic aluminum oxide (AAO) template synthesized by a two-step anodization method, a polymer template prepared by infiltration of a polymer solution into an AAO structure to a porous gold template fabricated by de-alloying of an Au-Ag solid solution. The morphology of the templates and the nanostructured ZnO-based carbon monoxide (CO) sensors were investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD) and transmission electron microscopy (TEM). The gas-sensing performance of sensors based on the different templates was measured successfully in terms of electrical response to detect CO as a hazardous gas. The tremendously increased surface to volume ratio of ZnO on an AAO (alike) template or porous gold template is thereby supposed to provide an enhanced sensing capability compared to 2D thin film or bulk sensor structures.