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O: Fachverband Oberflächenphysik

O 50: Poster Session - Plasmonics and Nanooptics: Fabrication and Characterization

O 50.6: Poster

Dienstag, 17. März 2020, 18:15–20:00, P2/EG

Nanometer precise fabrication of electrically connected gold nanoantennas using a helium ion microscope — •Jessica Meier, René Kullock, Thorsten Feichtner, and Bert Hecht — Nano-Optics and Biophotonics Group, Experimental Physics 5, University of Würzburg, Germany

Optical antennas can be used to control and enhance light-matter interaction on a nanometer scale and are therefore interesting for e.g. spectroscopy, optical sensing applications, and - if combined with electric connections - for electrically driven light emission. In all cases, a high fabrication accuracy, especially in the gap region, is mandatory for stable operation. Standard nanofabrication techniques including electron beam lithography and focused ion beam (FIB) milling using gallium (Ga) ions in combination with polycrystalline metal films achieve minimum feature sizes of 10 nm. The combination of Ga-FIB and helium ion microscope (HIM) based milling improves on that and allows to fabricate gap sizes down to 6 nm [1].
We present a Ga-FIB/HIM based milling approach combined with single-crystalline gold flakes, which already showed great improvements for pure Ga-FIB milling [2]. We are thus able to achieve nanometer precise antenna dimensions with high aspect ratios as well as gap sizes down to 3 nm. This opens the possibility to study field emission and nonlinear optical processes, namely second harmonic generation and two-photon photoluminescence.
[1] H. Kollmann et al., Nano Lett. 14, 4778-4784 (2014)
[2] J.-S. Huang et al., Nat. Commun. 1, 150 (2010)