Dresden 2020 – scientific programme
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O: Fachverband Oberflächenphysik
O 74: Nanostructured Surfaces and Thin Films I: Synthesis and Properties (joint session O/CPP)
O 74.2: Talk
Wednesday, March 18, 2020, 15:15–15:30, WIL B321
investigation of Fe(CO)5 as precursor for gas-assisted electron beam lithography techniques on cobalt oxide surfaces — •Elif Bilgilisoy1, Christian Preischl1, Rachel Thorman2, Howard Fairbrother2, and Hubertus Marbach1 — 1Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058, Erlangen, Germany — 2Department of Chemistry, Johns Hopkins University, Baltimore, Maryland/USA.
Electron Beam Induced Deposition (EBID) is a gas-assisted direct write electron-lithography fabrication technique in which structures from certain precursor molecules are deposited. A second technique is Electron Beam Induced Surface Activation (EBISA). In EBISA, a focused electron beam is used to locally modify the substrate such that it becomes active towards the decomposition of subsequently dosed precursor molecules [1]. Both approaches were conducted with Fe(CO)5 on a Co3O4/Ir(100) surface. We will present first successful results on a clean Co3O4 surface with Fe(CO)5 for EBID and EBISA. To achieve a deeper understanding of the EBID process, corresponding surface science experiments were conducted, in which the dynamics and behavior upon low energetic electron[2] and ion beam irradiation of thin Fe(CO)5 layers at liquid nitrogen temperatures were investigated using x-ray photoelectron spectroscopy (XPS) under UHV. We will compare the corresponding results and discuss the reaction mechanisms of Fe(CO)5. [1] H. Marbach, Appl. Phys. A 117 (2014) 987 [2] S. G. Rosenberg, et al., J. Phys. Chem. C, 117 (2013)16053