Dresden 2020 – wissenschaftliches Programm

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TUT: Tutorials

TUT 4: Nanofabrication and 3D Printing with Submicron Resolution (joint session CPP/TUT)

TUT 4.3: Tutorium

Sonntag, 15. März 2020, 17:30–18:15, HSZ 304

Nanofabrication and 3D printing with submicron resolution — •Michael Huth — Goethe University, Frankfurt am Main, Germany

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam lithography but is in addition capable of creating complex three-dimensional (3D) nano-architectures. Over the last decade several new developments in FEBID and focused electron beam induced processing (FEBIP) in general have led to a growing number of scientific contributions in solid state physics and materials science based on FEBID-specific materials and particular shapes and arrangements of the employed nanostructures. In this tutorial talk I will give an introduction to the most relevant aspects of FEBID with a particular focus on the creation of 3D functional structures. I will discuss simulation-assisted approaches to FEBID based on effective models for the reliable growth of complex 3D shapes and will briefly allude to microscopic modeling attempts that aim to go beyond growth rate and shape prediction. During the talk I will show different examples of 3D FEBID materials used in nano-magnetism, superconductivity, single-electronics and scanning probe microscopy.