Hannover 2020 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 10: Poster Session 2
P 10.26: Poster
Dienstag, 10. März 2020, 16:30–18:30, Empore Lichthof
Zirconium oxide based layers investigated by the 3 omega method — •Vitali Bedarev1, Philipp A. Maaß1, Marina Prenzel2, Marc Böke1,2, and Achim von Keudell1,2 — 1Institute for Experimental Physics II, Ruhr-University Bochum, Universitätsstr. 150, D-44780 Bochum,Germany — 2Research Department Plasmas with Complex Interactions, Ruhr-University Bochum, Universitätsstr. 150, D-44780 Bochum,Germany
Aim of the project is to develop thin layers by using deposition techniques like CVD and later PECVD which can be used for galvanic isolation. First step will be the evaporation of a precursor (based on a zirconium oxide bond). The evaporated gas is guided into the main chamber by using nitrogen (with a flow of 25/50 sccm). Hence a zirconium oxide layer is expected to be synthesized. The main focus is to study thermal conductivity of thin layers in-situ, therefore, one can use the 3 omega method.
Furthermore, we will analyze the change of the thermal conductivity depending on the morphology of the layer. The layer growth rate is expected to be > 500 nm/h and the layer thickness < 30 microns.