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P: Fachverband Plasmaphysik

P 12: Atmospheric-pressure plasma and applications 3

P 12.3: Vortrag

Mittwoch, 11. März 2020, 11:45–12:00, b305

Electric field behaviour of a micro cavity plasma array measured by Stark shift of helium — •Sebastian Dzikowski¹, Sylvain Iseni², Marc Böke¹, and Volker Schulz-von der Gathen¹ — ¹Ruhr-University, Bochum, Germany — ²GREMI, Orleans, France

Micro-structured array devices get more and more interest for gas reformation and plasma catalysis. In case of devices where cavities are integrated in the dielectric the applied electric field can strongly influence the interaction between plasma and catalyst.

Here we present a metal-grid array device consisting of a powered metal-grid, a dielectric foil and a grounded magnet. The grid contains uniformly arranged cavities with dimensions in the one hundred micrometer scale. This sandwich-like structure allows disassembling and exchange of the dielectric foil with catalytic properties. Typically, the metal-grid array operates close to the atmospheric pressure and is applied with a bipolar triangular voltage waveform with an amplitude up to 800 V at 15 kHz.

To measure the internal electric field, we use the 492.19 nm helium line that gets split in an allowed and forbidden counterpart. The distance between the two components is proportional to the electric field.

We present and discuss time-averaged and time resolved measurements depending on typical operation parameters such as applied voltage, cavity diameter and frequency.