Hannover 2020 – scientific programme

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P: Fachverband Plasmaphysik

P 16: Poster Session 3

P 16.23: Poster

Wednesday, March 11, 2020, 16:30–18:30, Empore Lichthof

Combination of a quartz crystal microbalance and a force probe as a diagnostic tool for an ion beam experiment — •Manuel Maas, Mathis Klette, and Holger Kersten — Institute of Experimental and Applied Physics, University of Kiel, Germany

Many properties of a solid surface can be modified by a thin deposited film. One way to deposit thin films is via energetic ions. This method of physical vapor deposition is called sputtering. In order to monitor and optimize this process, different diagnostics are needed. Especially, angular resolved measurements are highly demanded.

A commonly used diagnostic for the deposition process is the quartz crystal microbalance [1]. It is a shear mode resonator which can be used to determine the deposited mass loading. Another diagnostic for sputtering is a force probe [2]. This diagnostic developed in our group uses the deflection of a rod to obtain the applied force. In particular, the deflection is determined by interferometric measurements.

The quartz crystal microbalance and the combined probe are tested in an ion beam experiment by sputtering aluminium and aluminiumoxide. The angular distribution of the sputtered/reflected atoms is measured. To evaluate the obtained data, a simulation based on the software TRIM is used [3].

[1]G. Sauerbrey, Zeitschrift für Physik 155, 206-222 (1959).

[2]Spethmann, A., Trottenberg, T., Kersten, H., Phys. Plasmas 24(2017), 093501.

[3]J. Biersack and L. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).