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P: Fachverband Plasmaphysik

P 18: Complex plasma and Low-temperature plasma and applications 2

P 18.4: Vortrag

Donnerstag, 12. März 2020, 12:25–12:40, b302

FTIR monitoring of nanoparticles synthesized in a capacitively coupled low-pressure plasma — •Oguz Han Asnaz, Franko Greiner, and Jan Benedikt — Institute of Experimental and Applied Physics, Kiel University, Germany

Due to their unique physical, mechanical, electrical, and optical properties, in the last decades, nanoparticles have found a wide range of applications ranging from drug carriers in biomedicine over catalysts to batteries and solar cells. In all of these, fine control of the particle’s surface properties as well as the bulk crystallinity is required.

Here, we present results of in situ analysis of Ar/C2H2-plasma-generated a-C:H nanoparticles by means of time-resolved multi-pass FTIR spectroscopy in parallel to optical light scattering techniques during operation. While the scattering techniques work well for larger particles, the absorption spectroscopy can be operated with particles with sizes even in the nanometer range, depending only on the density of absorbing features (chemical bonds on or in particles), i.e., independent of particle size. The a-C:H particles serve as a first model system to compare both measurement methods. In the future, surface modifications of silicon, metal or metal-oxide nanoparticles generated in external plasma sources will be studied, which will allow insight into the dynamics of surface oxidation, passivation, and thin-film deposition.