Hannover 2020 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 3: Low-temperature plasma and applications 1
P 3.1: Hauptvortrag
Montag, 9. März 2020, 14:00–14:30, b302
Diagnostics of magnetized high frequency technological plasmas — •Julian Schulze1,2, Moritz Oberberg1, Birk Berger1, Jens Kallähn1, Dennis Engel1, Christian Wölfel1, Jan Lunze1, Ralf Peter Brinkmann1, and Peter Awakowicz1 — 1Institute of Electrical Engineering, Ruhr-University Bochum — 2School of Physics, Dalian University of Technology, China
Capacitively coupled radio frequency (RF) magnetrons are frequently used for sputter deposition of ceramic layers. However, fundamentals of their operation such as the effects of the magnetic field on the electron power absorption dynamics and the formation of process relevant flux-energy distribution functions are not understood. In order to address these issues, we characterize such a discharge operated in argon with oxygen admixture at low pressure by a synergistic combination of different experimental diagnostics [current/voltage measurements, retarding field energy analyzer, multipole resonance probe, phase resolved optical emission spectroscopy (PROES), magnetic field measurements]. We find that the magnetron magnetic field induces a discharge asymmetry. This Magnetic Asymmetry Effect affects the DC self bias and ion flux-energy distribution functions at boundary surfaces, which can be controlled by adjusting the magnetic field. Tuning the magnetic field also allows to magnetically control the self-excitation of plasma series resonance oscillations of the RF current and, thus, Non-Linear Electron Resonance Heating. PROES reveals space and time resolved insights into the dynamics of the electron power absorption in the presence of the magnetic field.