Hannover 2020 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 5: Poster Session 1
P 5.20: Poster
Montag, 9. März 2020, 16:30–18:30, Empore Lichthof
Atmospheric Pressure Plasma for Nano Particle Generation — •Jessica Ruhnke, Sadegh Askari, Judith Golda, and Jan Benedikt — Institute of Experimental and Applied Physics, Kiel University, Germany
Silicon nano particles have a wide range of applications from optoelectronic to photovoltaic and medicine. Atmospheric pressure plasmas are able to generate nano particles and nano crystals with excellent size control from even 1 nm diameter. However, the nano particle growth mechanism and the possible surface modifications are still not well understood and studied.
Here we present the characterization and comparison of two atmospheric pressure plasmas for nano particle generation driven by a radio frequency voltage in a mixture of Ar-He-SiH4 gas: a smaller capillary source with planar electrodes and a bigger helix jet with specially designed electrodes. Various methods are used for analysis of the sources. Relevant plasma properties are determined by optical emission spectroscopy. The particle size can be analysed in situ by a 1 nm scanning mobility particle sizer and ex situ by Fourier-transform infrared spectroscopy and transmission electron microscopy.