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P: Fachverband Plasmaphysik

P 5: Poster Session 1

P 5.21: Poster

Montag, 9. März 2020, 16:30–18:30, Empore Lichthof

Spatially resolved atomic oxygen densities in the ’COST Reference Microplasma Jet’ — •David Steuer, Patrick Preissing, Volker Schulz-von der Gathen, and Marc Böke — Experimental Physics II, Ruhr-University Bochum, Germany

Cold atmospheric pressure plasmas are used for activation of surfaces, etching, coating and biomedical treatments. For these applications, reactive species such as atomic oxygen are produced in the plasma and require monitoring. A non-invasive and less complex method than laser diagnostics (e.g. TALIF) is optical emission spectroscopy (OES), specifically actinometry. The method was applied to a micro-scaled atmospheric pressure plasma jet, namely the COST-Jet [1]. The capacitively coupled 13.56 MHz RF-discharge can be observed through quartz plates. The discharge channel is imaged on a fast, gated intensified CCD camera via electronically tunable filters. This setup allows ns-resolved measurements of oxygen and argon (actinometer gas) transitions, whereby the wavelength (550-1000 nm) can be switched within 100 ms, giving the opportunity to acquire a set of several spectral lines in a few seconds. A spatial resolution is given by a single measurement through the imaging of the complete discharge channel. Typical oxygen densities of 10¹⁵ cm⁻³ are obtained, which correspond to TALIF measurements.

[1] J. Golda et al., J. Phys. D: Appl. Phys. 49 (2016) 084003.