Hannover 2020 – scientific programme

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P: Fachverband Plasmaphysik

P 5: Poster Session 1

P 5.22: Poster

Monday, March 9, 2020, 16:30–18:30, Empore Lichthof

Study of a 2.45 GHz plasma torch for synthesis of fused silica: operation with different Ar−O₂ mixtures — •M. Stankov¹, T. Trautvetter², H. Baierl², R. Methling¹, F. Hempel¹, J. Schäfer¹, M. Baeva¹, R. Foest¹, and D. Loffhagen¹ — ¹Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany — ²Leibniz Institute of Photonic Technology (IPHT), 07745 Jena, Germany

Simulation analysis and experimental studies of a 2.45 GHz (µW) torch are presented. The device is suitable for the deposition of synthetic fused silica including a simultaneous co-doping with Al-Yb-F. The plasma is generated in a quartz tube positioned in normal direction to a rectangular wave guide R26, at the maximum electric field (TE10). Ar−O₂ mixtures are fed through the tube and drive the discharge which develops in the tube outwards through the nozzle where the torch is formed. For investigations on material synthesis, the system can be completed by an external supply for the injection of precursors into the torch and a rotating substrate. The plasma is simulated using a time-dependent, 2D numerical model considering the plasma kinetics, the energy conservation of electrons and heavy particles, the electromagnetic field and the gas flow. The study comprises different gas compositions from pure Ar to pure O₂. The gas temperature is calculated and compared with results from optical emission spectroscopy where OH emissions are exploited to simulate the prevalent gas temperature. The experiments are complemented by IR thermography. (Supported by Leibniz-Gemeinschaft SAW-2017-IPHT-1)