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P: Fachverband Plasmaphysik

P 6: Plasma-surface interaction

P 6.3: Vortrag

Dienstag, 10. März 2020, 11:55–12:10, b302

Determination of the energy distribution of sputtered atoms from polished metallic surfaces by high resolution spectroscopy — •Stephan Ertmer, Oleksandr Marchuk, Sven Dickheuer, Sebastijan Brezinsek, Philippe Mertens, Marcin Rasiński, and Arkadi Kreter — Forschungszentrum Jülich GmbH - Institut für Energie- und Klimaforschung - Plasmaphysik, Partner of the Trilateral Euregio Cluster (TEC), 52425 Jülich, Germany

Knowledge of the energy distribution of sputtered atoms for ions at low impact energies is essential for different applications. We modelled the distribution from the line shape emitted by sputtered aluminium (Al) and tungsten (W). Mirror-polished Al and W samples were exposed to an argon (Ar) plasma (T_e= 3 eV; n_e = 3.5 × 10¹⁸ m⁻³) in the linear plasma device PSI-2. The plasma ions were accelerated to impact energies of 30 to 160 eV onto the target by biasing. The line of sight of a high resolution spectrometer (resolving power λ/Δλ = 7× 10⁵) was directed parallel to the target normal. The energy distribution of the sputtered atoms was modelled from the detected line shape using the Doppler-shifted-emission model [1] with an extension considering instrumental broadening and Zeeman splitting. The results show good agreement with the Thompson energy distribution. For an increase in the impact energy of the Ar⁺ ions, we observe an increase in the high energy tail of the sputtered atoms distribution function. Furthermore, the reflection of light at the targets surface was modelled from the line shape and the surface binding energies were determined.

[1] S. Dickheuer et al. Phys. Plasmas 26, 073513 (2019)