Hannover 2020 – scientific programme

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P: Fachverband Plasmaphysik

P 8: Low-temperature plasma and applications

P 8.2: Talk

Tuesday, March 10, 2020, 14:25–14:40, b302

Azimuthal particle transport in high power impulse magnetron sputtering plasmas — •Sascha Thiemann-Monjé, Julian Held, and Achim von Keudell — Experimental Physics II, Ruhr-University Bochum, 44780 Bochum, Germany

In the past years high power impulse magnetron sputtering (HiPIMS) has become a well established method for depositing high quality hard coatings. Nevertheless, knowledge about the processes inside the discharge is still incomplete. This includes the azimuthal rotation of heavy particles which is induced by the electron Hall-current and is believed to be influenced by rotating ionization zones, the so called ’spokes’.

In this work, optical emission spectroscopy (OES) and energy resolved ion mass spectrometry where used to gain further understanding of the above mentioned particle movement. While OES delivers information about the emitting particles inside the plasma the mass spectroscopy will see the particles which leave the plasma only. The measurements where done for a circular Ti-target with 50 mm diameter and 0.5 Pa Argon as working gas.

It could be shown that the maximum rotation velocity is in the range of 0.5 - 1.8 km/s depending on the measured species. Differences in the axial distribution of these velocities for Ar and Ti show an dependency on the axial movement of the particles. Furthermore power and time variations where performed showing no reasonable influence.