Hannover 2020 – scientific programme

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Q: Fachverband Quantenoptik und Photonik

Q 13: Posters: Quantum Optics and Photonics I

Q 13.36: Poster

Monday, March 9, 2020, 16:30–18:30, Empore Lichthof

Mueller matrix microscopy setup for nanoform metrology — •Jana Grundmann, Tim Käseberg, and Bernd Bodermann — Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany

Mueller matrix ellipsometry is an indirect method for measuring optical parameters of a nanostructure. As an extension, the classical Mueller matrix ellipsometer can be combined with a microscope to a Mueller matrix microscope, which can measure Mueller matrices pixel by pixel. We constructed a microscope of this kind in such a way that measurements can be made both in reflection and transmission. Our device is a so called dual-rotating compensator ellipsometer and has a CCD-camera as a detector. In a first step, the light source will be a white LED in combination with different passband filters for monochromatic measurements. It is planned to extend the set-up later with a monochromator and a 1 kW xenon lamp to enable spectroscopic measurements. This system will be used to investigate the capability of imaging Mueller ellipsometry to provide additional information on the shape of nano-scaled structures which cannot be seen in classical bright field microscope images. This is done in particular by analyzing the off-diagonal Mueller matrix elements.