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Q: Fachverband Quantenoptik und Photonik

Q 13: Posters: Quantum Optics and Photonics I

Q 13.45: Poster

Montag, 9. März 2020, 16:30–18:30, Empore Lichthof

Reliable Nanofabrication for color center-based diamond sensors — •Dipti Rani, Oliver Opaluch, Richard Nelz, Mariusz Radtke, and Elke Neu — Saarland University, Campus E2.6, 66123 Saarbrücken

Individual, luminescent crystal defects in diamond, i.e. color centers, are stable, atomically sized quantum systems. Negative nitrogen vacancy (NV) centers represent isolated electronic spins that we manipulate using microwave radiation, while we read-out their spin state optically [1]. To enable nanoscale sensing, we incorporate NVs into highly functional photonic nanostructures. These tip-like structures enable scanning our NV centers close (< 50 nm) to a sample to record nanoscale resolution images e.g. of magnetic fields. We discuss our recent achievements in optimizing dedicated nanofabrication routines for our sensor devices which are crucial in the context of scalability as well as commercialization [2,3]. Results include a process optimizing adhesion of HSQ resists to diamond as well as the search for alternatives to HSQ. We furthermore address the influence of various plasma treatments on NV centers.
[1] M. Radtke et al., Arxiv 1909.03719 (2019)
[2] M. Radtke et al. Micromachines, 10, 718 (2019)
[3] M. Radtke et al., Opt. Mater. Express 9(12), 4716-4733 (2019)