Hannover 2020 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 27: Quantum Optics III
Q 27.3: Talk
Wednesday, March 11, 2020, 11:30–11:45, f342
Amorphous superconducting nanowire single-photon detectors integrated with nanophotonic waveguides — •Matthias Häußler1, Mikhail Mikhailov2, Martin A. Wolff1, and Carsten Schuck1 — 1Institute of Physics and Center for Nanotechnology, University of Münster, D-48149 Münster, Germany — 2B. Verkin Institute for Low Temperature Physics and Engineering of the National Academy of Sciences of Ukraine, 61103 Kharkiv, Ukraine
Waveguide-integrated superconducting-nanowire single photon detectors (SNSPDs) are a highly promising detector technology to enable complex integrated quantum photonic experiments. While SNSPDs offer very attractive performance characteristics, current material systems only achieve limited fabrication yield, thus preventing large-scale implementations.
Here we show that waveguide-integrated SNSPDs can be realized from amorphous superconducting thin films, which promise highly reproducible nanowire fabrication because of their inherent insensitivity to the substrate material. We develop a multi-layer lithography process for patterning molybdenum silicide nanowires in travelling-wave geometry on silicon-nitride waveguides. The resulting detectors show a saturated on-chip detection efficiency of 73 % for 1550 nm wavelength photons at a temperature of 2.1 K. We further find a reset time below 5 ns allowing for high detection rates in the range of several hundred MHz. Our results pave the way for in-depth studies of fabrication yield and performance of amorphous SNSPDs integrated in large numbers on a wide range of photonic platforms.