Hannover 2020 – scientific programme

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Q: Fachverband Quantenoptik und Photonik

Q 39: Posters: Quantum Optics and Photonics III

Q 39.24: Poster

Wednesday, March 11, 2020, 16:30–18:30, Empore Lichthof

Towards fabrication and optimization of LNOI nano-waveguides — •Laura Bollmers, Laura Padberg, Sebastian Lengeling, Christof Eigner, and Christine Silberhorn — Universität Paderborn, Integrierte Quantenoptik, Warburger Str. 100, D-33098 Paderborn

Lithium niobate on insulator (LNOI) is a material platform of growing interest. Thin-film of lithium niobate currently revolutionizes the old lithium niobate platform since it allows for the miniaturization of devices. Especially the nano-waveguides with its high refractive index difference make them attractive for non-linear processes in integrated optics in general, in particular also for a novel class of quantum optical devices. Due to the novelty of the material, where substantial research occurs since only a few years, the experience with LNOI compared to other materials is still quite limited. This makes LNOI a technological challenging material.
We face the challenge and establish a reliable LNOI technology. On a first step we focused on the fabrication of nano-waveguides. We use a dry etching process with the need of etching masks. Hence, we tested different materials like titanium and photo resist on bare lithium niobate to find the optimal etching masks. We demonstrate that photo resist is the best choice to get smooth waveguide sidewalls. After optimization we transferred the fabrication process to the LNOI platform. We show our recent results of in-house fabricated LNOI nano-waveguides.