SAMOP 2021 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 3: Photonics and Laser Development
Q 3.2: Poster
Montag, 20. September 2021, 16:30–18:30, P
Hybrid Microring Resonators: towards Integrated Single Photon Emitters with a Novel Fabrication Approach — •Giulio Terrasanta1, Timo Sommer1, 3, Manuel Müller2, 1, Matthias Althammer2, 1, and Menno Poot1, 3, 4 — 1Department of Physics, Technical University Munich, Garching, Germany — 2Walther-Meißner-Institut, Bayerische Akademie der Wissenschaften, 85748 Garching, Germany — 3Munich Center for Quantum Science and Technology (MCQST), Munich, Germany — 4Institute for Advanced Study, Technical University Munich, Garching, Germany
Aluminum nitride (AlN) is an emerging material for integrated quantum photonics, thanks to its excellent linear and nonlinear optical properties. Its second-order nonlinearity allows the realization of single photon emitters, which are a critical component for quantum technologies. Nevertheless, the fabrication of AlN, in particular its etching, can be challenging. Here, we demonstrate the integration of AlN on Silicon Nitride (SiN) photonic circuits with a novel approach that depends only on the SiN reliable fabrication. By sputtering c-axis oriented AlN on top of pre-patterned SiN, we realized hybrid microring resonators. The material properties were characterized using XRD, optical reflectometry, SEM, and AFM. We varied AlN thickness, ring radius, and waveguide width in different chips to benchmark the optical properties, such as the quality factor, propagation losses and group index. The hybrid resonators can have quality factors as high as 500K, thus being a promising platform to amplify the nonlinear optical properties of AlN.