SKM 2021 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 10: Focus Session: Highlights of Materials Science and Applied Physics I (joint session DS/HL)

HL 10.1: Topical Talk

Dienstag, 28. September 2021, 13:30–14:00, H3

Single crystal diamond grown by CVD: state of the art, current challenges and applications — •Jean-Charles Arnault¹, Samuel Saada², and Victor Ralchenko^{3, 4} — ¹NIMBE, UMR CEA-CNRS 3685, Université Paris-Saclay, F-91191 Gif sur Yvette, France — ²CEA, LIST, DM2I, F-91191 Gif-sur-Yvette, France — ³Prokhorov General Physics Institute of Russian Academy of Sciences, Vavilov str. 38, Moscow 119991, Russia — ⁴Harbin Institute of Technology, Harbin 150080, P.R. China

Single crystal diamond is the material of choice for future power electronics. Its electrical and thermal properties outperform those of other wide band gap semiconductors like 4H-SiC, GaN or Ga2O3. In addition, diamond can host a wide range of color centers (NV, SiV, GeV,...) that bring optical and spin properties suitable for quantum applications. This explains the ultrafast development of quantum applications based on diamond materials within the last years. For both application fields, diamond films of excellent crystalline quality are required and an accurate tuning of dopants is needed. This talk will draw the state of art of single crystal diamond grown by CVD either starting with diamond substrate (homoepitaxy) or controlling diamond epitaxial nucleation on a foreign substrate (heteroepitaxy). Progresses on substrates, growth mechanisms and reduction of structural defects, doping, upscaling and applications will be reviewed. In light of last progresses, future challenges and the respective roles of homoepitaxial and heteroepitaxial materials in the applications roadmap will be discussed.