SKM 2021 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 19: Poster Session IV
HL 19.16: Poster
Thursday, September 30, 2021, 13:30–16:30, P
Reduction of crystal defects in GaP buffer layers grown on Si(100) by MOCVD — •Manali Nandy1, Agnieszka Paszuk1, Markus Feifel2, Christian Koppka1, Peter Kleinschmidt1, Frank Dimroth2, and Thomas Hannappel1 — 1TU Ilmenau, Gustav-Kirchhoff-Straße 5, 98693, Ilmenau — 2Fraunhofer Institute for Solar Energy Systems ISE, Freiburg 79110, Germany
The performance of III-V-on-Si multijunction solar cells is still limited by a high density of defects at the GaP/Si heterointerface and in the III-V buffer layers. Here, in order to improve the crystal quality of the GaP(100) buffer layer, we modified the GaP pulse nucleation by substituting the first five TEGa pulses with TMAl. The influence of Al on the defect density in the GaP buffer layers is investigated by electron channeling contrast imaging. 60 nm thick GaP(100) buffer layers grown on GaP nucleation exhibit short misfit dislocations (MDs) and therefore, a high density of threading dislocations (TDs). In contrast, GaP(100) buffer layers grown on GaP/AlP nucleation exhibit less, but longer MDs, which result in a lower density of TDs. In addition, the density of stacking faults and stacking faults pyramids in the GaP layer grown on the AlGaP nucleation is significantly reduced. The surface morphology at the initial growth stage of GaP buffer layers grown on AlGaP nucleation, is smoother compared to buffer layer grown on the GaP nucleation. The application of Al in the GaP nucleation process provides a two-dimensional, smooth layer on which subsequent, high-quality GaP films could be grown, and therefore, shows a promising pathway for improving the performance of III-V-on-Si devices.