SKM 2021 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 8: Poster Session II

HL 8.32: Poster

Dienstag, 28. September 2021, 10:00–13:00, P

The role of Sr deficiency in SrTiO3 thin films grown by metal-organic vapor phase epitaxy — •Aykut Baki, Julian Stöver, Tobias Schulz, Houari Amari, Carsten Richter, Jens Martin, Klaus Irmscher, Martin Albrecht, and Jutta Schwarzkopf — Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2 in 12489 Berlin

SrTiO3 is widely studied due to interesting physical properties such as its high permittivity at room temperature, resistive switching and strain induced ferroelectricity. However, the underlying physical origin of these effects is not fully understood. In order to investigate the influence of structural defects on the physical properties, we performed the growth of SrTiO3 films by liquid-delivery spin metal-organic vapor phase epitaxy, which takes place nearby the thermodynamic equilibrium and at high oxygen partial pressures ensuring growth of films with high quality and negligible amount of oxygen vacancies. In this study, homoepitaxial SrTiO3 thin films were grown on 0.5 wt.% niobium doped SrTiO3 (100) substrates with varying Sr/Ti ratio in the gas phase. This provides single-phase stoichiometric and deliberately off-stoichiometric thin films with an intentionally incorporated Sr deficiency. Even films with Sr deficiency of up to 20 % were grown without the formation of any extended defects or foreign phase. In-situ high-resolution x-ray diffraction and transmission electron microcopy measurements verified a negligible amount of oxygen vacancies in the films and the absence of conductive oxygen filaments at typically applied switching voltages in a metal-oxide-semiconductor structure. The observed physical properties are Sr-deficiency related.