SMuK 2021 –
wissenschaftliches Programm
P 1: Low Pressure Plasma Sources I
Montag, 30. August 2021, 11:00–12:30, H5
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11:00 |
P 1.1 |
Hauptvortrag:
Diagnostics of magnetized high frequency technological plasmas — •Julian Schulze, Moritz Oberberg, Birk Berger, Julian Roggendorf, Dennis Engel, Christian Wölfel, Jan Lunze, Ralf Peter Brinkmann, and Peter Awakowicz
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11:30 |
P 1.2 |
Spectroscopic determination of rotational and vibrational temperatures in nitrogen microwave discharges from low to atmospheric pressure — •David Rauner, Alistair Brydon, Ante Hecimovic, and Ursel Fantz
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11:45 |
P 1.3 |
Plasma enhanced chemical vapour deposition of ZrO2 based layers — •Philipp A. Maaß, Vitali Bedarev, Sebastian M.J. Beer, Marina Prenzel, Marc Böke, Anjana Devi, and Achim von Keudell
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12:00 |
P 1.4 |
Infrared-spectrometric monitoring of the growth and surface treatment of a-C:H nanoparticles in a low-pressure plasma — •Oguz Han Asnaz, Niklas Kohlmann, Hauke Folger, Franko Greiner, and Jan Benedikt
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12:15 |
P 1.5 |
Ion energy and collisions in high power impulse magnetron sputtering discharges — •Julian Held, Sascha Thiemann-Monjé, Achim von Keudell, and Volker Schulz-von der Gathen
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