SMuK 2021 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 1: Low Pressure Plasma Sources I
P 1.4: Vortrag
Montag, 30. August 2021, 12:00–12:15, H5
Infrared-spectrometric monitoring of the growth and surface treatment of a-C:H nanoparticles in a low-pressure plasma — •Oguz Han Asnaz1, Niklas Kohlmann2, Hauke Folger1, Franko Greiner1, and Jan Benedikt1 — 1Institute of Experimental and Applied Physics, Kiel University, Germany — 2Faculty of Engineering, Kiel University, Germany
Due to their unique physical, mechanical, electrical, and optical properties, nanoparticles have found a wide range of applications ranging from drug carriers in biomedicine over catalysts to batteries and solar cells. Control of the particle’s bulk and surface properties is required in many of these applications.
In this contribution, we present results for a-C:H nanoparticles generated in a capacitively coupled low-pressure plasma and monitored by means of in situ time-resolved FTIR spectroscopy during operation with a multipass cell with 24 passes. The particles reach a size of about 500 nm after 90 seconds of growth and can be confined easily for multiple hours for treatment with hydrogen and deuterium as a first reactive test treatment to investigate in situ the surface treatment or particle etching and reveal the potentials and sensitivity of these diagnostics for other reactive plasma treatments. Additionally, using an electrostatic particle extractor system (EPEX) developed in our group, particle samples are extracted at multiple moments during the treatment for further SEM analysis with negligible disturbance of the plasma.