SMuK 2021 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 17: Poster II
P 17.1: Poster
Freitag, 3. September 2021, 14:00–16:00, P
Minimal invasive extraction and ex situ analysis of nanoparticles synthesized in a reactive plasma — •Maren Dworschak, Franko Greiner, and Oguz Han Asnaz — Institut für Experimentelle und Angewandte Physik, CAU Kiel
Plasma systems generating nanometer-sized particles are relevant for a broad range of applications from biomedicine to catalysis and batteries where knowledge about the size of the generated particles and their size distribution is critical. In situ analysis of nanoparticles created in a reactive Ar/C2H2-plasma using kinetic Mie-ellipsometry encounters problems when trying to detect particles at both extremes of the size scale. Because it reaches its limits for small (<50 nm, Rayleigh regime) and very large particles (>250 nm, multiple scattering) ex situ analysis has to be done. An optimal particle extractor should (i) not disturb the plasma chemistry, (ii) not change the discharge properties, and (iii) be able to extract several samples during one growth cycle.
We present a device to extract nanoparticles at multiple moments during a single growth cycle, while not disturbing the process itself. The extraction method is based on the electrostatic force and allows to extract particles at eight stages of the growth process. During extraction, we monitor the dynamics of the particle cloud with a camera and the particle size via Mie-ellipsometry. The particles are diagnosed ex situ with atomic force microscopy to determine the particle size distribution. The particle charge can be estimated using force balance equations. [Dworschak et al., Plasma Sources Sci. Technol. (2021), https://iopscience.iop.org/article/10.1088/1361-6595/abe4c0]