SMuK 2021 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 17: Poster II

P 17.20: Poster

Freitag, 3. September 2021, 14:00–16:00, P

Control of Spokes in Magnetron Discharges — •Mathews George, Wolfgang Breilmann, Julian Held, and Achim von Keudell — Experimentalphysik II, Ruhr-University Bochum

Magnetron Sputtering is a Plasma Vapour Deposition (PVD) process widely used in industry and scientific communities. The plasma appears to be homogeneous to the human eye, but shows localised zones of high brightness rotating in the E x B direction when observed with an ICCD camera with exposure times below 1µs. These local ionization zones, also called ’spokes’ are assumed to play a role in the transport of particles and energy away from the target. This anomalous transport results in an enhanced deposition rate by counteracting the return effect. The primary objective of this project is to control spoke frequency in HiPIMS in-order to study its influence on the IEDF and metal ion flux from the target. Controlling metal ion flux from the target would lead to a better deposition rate and quality of the film. DCMS was chosen for the development of spoke control as an initial test object since the spokes in DC regime are more uniform compared to HiPIMS. Amplified rectangular signals are applied to a Langmuir probe to draw electron current from the plasma at the highest gradients in the E x B direction. The responses of the spoke frequency and intensity to the applied signal are measured with a flat probe. The metal ion flux from the target surface is measured time and energy resolved with a mass spectrometer. This study is then further extended to HiPIMS spokes by applying signals on multiple probes to achieve an effective control of spokes.