SMuK 2021 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 5: Poster I
P 5.22: Poster
Dienstag, 31. August 2021, 14:00–16:00, P
Comparing ion energy distributions of a symmetric capacitively coupled plasma with 1D-PIC/MCC simulations: an alternative approach to estimate γ coefficients? — •Christian Schulze1, Zoltán Donkó2, and Jan Benedikt1 — 1Institute of Experimental and Applied Physics, Kiel University, Germany — 2Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
Secondary electron emission (SEE) is an important effect since it directly influences not only the plasma ignition but also the plasma properties. Changes in plasma properties can be utilized to estimate SEE coefficients under realistic conditions for example from the I-V-characteristics of magnetron discharges [D Depla et al 2008 J. Phys. D: Appl. Phys. 41 202003]. But plasma density, plasma potential and sheath thickness also have an impact on the ion transport through the sheath and on the ion energy distribution function (IEDF). Here, we critically discuss potentials and challenges of using energy resolved ion mass spectrometry measurements of IEDFs and their comparison to 1D-PIC/MCC simulations for the estimation of SEE coefficients.
Two identical symmetric capacitively coupled plasma (CCP) electrodes are coated with Al and Al2O3, respectively, to investigate the impact of changed surface properties on the IEDF of Ar+ ions. Since pressure, electrode distance and neutral gas temperature can have a similar impact on the IEDF as the SEE coefficient, their impact on the IEDFs need to be analyzed and they need to be determined with sufficient precision to avoid systematic errors.