Erlangen 2022 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 31: Photonics I
Q 31.7: Vortrag
Mittwoch, 16. März 2022, 12:00–12:15, Q-H15
Tabletop setup for broadband absolute EUV reflectivity measurements from single exposures — •Johann Jakob Abel1, Felix Wiesner1, Florian Funke1, Julius Reinhard2, Martin Wünsche2, Jan Nathanael3, Christian Rödel4, Silvio Fuchs1,2, and Gerhard G. Paulus1,2 — 1IOQ, FSU Jena, Germany — 2Helmholtz Institut Jena, Germany — 3IOF, Jena, Germany — 4TU Darmstadt, Germany
The broadband measurement of EUV reflectivity from samples is of particular interest for multilayer EUV mirror characterization [1], EUV reflection spectroscopy [2], and EUV imaging applications [3]. A tabletop setup for measurements allowing to record reference and sample spectra simultaneously with high energy resolution in a range between 40 and 100 eV is presented. The presented method provides a solution for extremely precise and robust absolute reflectivity measurements even when operating with unstable and spectrally fluctuating EUV sources. The simultaneous reference measurement improves the stability by more than one order of magnitude in comparison to a single independent reference measurement. Applications and advantages in nanoscopic three-dimensional imaging with XUV coherence tomography (XCT) [4] and reflective near-edge x-ray absorption fine structure spectroscopy (NEXAFS) are presented and discussed.
[1] J. Li, Optics Letters, 43, 16 (2018)
[2] L. Bahrenberg, Optics Express 28, 14 (2020)
[3] S. Skruszewicz, Appl. Phys. B 127, 55 (2021)
[4] S. Fuchs, Optica 4, 903-906, (2017)