Erlangen 2022 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 43: Quantum Technologies
Q 43.5: Poster
Mittwoch, 16. März 2022, 16:30–18:30, P
Fabrication of micro 4H-SiC lenses for quantum and photonic applications — •Marina Scharin-Mehlmann1, Julietta Foerthner1, Mathias Rommel1, Christian Gobert1, Susanne Beuer1, Patrick Berwian1, and Roland Nagy2 — 1Fraunhofer Institute for Integrated Systems and Device Technology IISB, Schottkystrasse 10, 91058 Erlangen, Germany — 2Chair of Electron Devices, Friedrich-Alexander-University Erlangen-Nuremberg, Cauerstrasse 6, 91058 Erlangen, Germany
Silicon carbide (4H-SiC) is a very promising material platform for quantum applications and nanophotonics, such as quantum sensing, computation or communication. However, the main drawback of 4H-SiC is its high refractive index, which reduces the collected defect photoluminescence. In our previous work, we showed that lens structures optimized by numerical simulation can have a strong impact on the collection efficiency. Now, in order to increase the total photon collection efficiency, we demonstrate two possible approaches of producing micro lens structures in 4H-SiC. Firstly, we successfully manufacture lens structures by focus ion beam milling. Secondly, we use a scalable method of fabricating 4H-SiC lenses by photolithography and a reflow process in order to create hemispherical droplets, followed by an etching process. We fabricate the optimized simulated lens shape variations for investigating and maximizing collection efficiency.