Erlangen 2022 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 61: Quantum Optics (Miscellaneous)
Q 61.16: Poster
Thursday, March 17, 2022, 16:30–18:30, P
Design and fabrication of metalenses — •Shan Song1 and Andreas Schell2 — 1Institut für Festkörperphysik, Leibniz Universität Hannover, Hannover, Deutschland — 2Institut für Festkörperphysik, Leibniz Universität Hannover, Hannover, Deutschland
Recently, researchers have shown an increased interest in tailoring light by metasurfaces. A metasurface is a two-dimensional ultra-thin layer, artificially fabricated by planar structures on a sub-wavelength scale. By interaction with the planar structure, the transmitted light can be phase-shifted. Compared to conventional optical elements, metasurfaces are capable to manipulate the light wavefront accurately by specific nanostructures and they can be fabricated using microfabrication processes. The imaging of quantum emitters by metalenses in optical quantum technologies is the focus of interest. We are designing and fabricating a high numerical aperture metasurface lens, which is composed of polysilicon nanodiscs on a quartz glass substrate. By variation of discs diameter and periodicity, the full 2π phase shift and the high numerical aperture are achieved. It consists of multiple steps in the fabrication process, mainly including the deposition of a thin polysilicon layer by low-pressure chemical vapor deposition, the pattern determination by application of hydrogen silsesquioxane negative resist in electron beam lithography and the pattern transfer on polysilicon layer by reactive ion etching. After the fabrication of nanostructures, the structures will be covered with a polydimethylsiloxane layer, which ensures a homogeneous environment of light propagation.