Heidelberg 2022 – wissenschaftliches Programm
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T: Fachverband Teilchenphysik
T 65: Silicon Strip Detectors
T 65.1: Vortrag
Mittwoch, 23. März 2022, 16:15–16:30, T-H24
Optical inspection of silicon strip sensors for the Phase-2 Upgrade of the CMS Tracker — Anna Becker1, Christian Dziwok2, Lutz Feld1, Patrick Juraschitz1, Katja Klein1, Martin Lipinski1, Alexander Pauls1, Oliver Pooth2, •Nicolas Röwert1, and Tim Ziemons2 — 1I. Physikalisches Institut B, RWTH Aachen University, Germany — 2RWTH Aachen University - Physics Institute III B, Aachen, Germany
During the Long Shutdown 3 the LHC will be upgraded to the High Luminosity LHC with a planned instantaneous luminosity of at least 5 · 1034 cm−2s−1. For this purpose the current strip tracker of the CMS experiment will be entirely replaced by a new system consisting of innovative silicon detector modules. RWTH Aachen University as one of the assembly centers is responsible for manufacturing around 1000 so-called 2S modules, which are equipped with two vertically stacked strip sensors having an active area of 10 · 10 cm2.
During module production the inspection of the silicon sensors is crucial in order to detect damage or contamination caused by the assembly process which could seriously affect the successful operation of the module. For this purpose an automated optical inspection setup has been developed. It consists of a 24 mega pixel camera equipped with a macro lens and an xy-stage.
This talk presents the setup, the approach to detect damages, and results obtained from images taken in the course of the assembly of a 2S module prototype featuring preproduction sensors.