Mainz 2022 – scientific programme

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P: Fachverband Plasmaphysik

P 1: Invited talks I

P 1.3: Invited Talk

Monday, March 28, 2022, 12:00–12:30, P-H11

Surface modification of inorganic materials by atmospheric-pressure plasmas — •Claus-Peter Klages and Vitaly Raev — Institute for Surface Technology, Technische Universität Braunschweig, Braunschweig, Germany

As far as applications in surface technology are concerned, atmospheric-pressure plasmas such as dielectric barrier discharges (DBDs) are frequently associated with polymeric surfaces and plasma polymer deposition. In the present contribution it will be demonstrated, however, that DBDs can also be applied to achieve practically useful modifications of inorganic surfaces utilizing processes which are also of scientific interest.

Examples are the reduction of metal compounds like oxides or sulfides as well as the oxidation of metals, hydrolysis of siloxane bonds on silica surfaces, and the pretreatment of silicon surfaces for low-temperature direct wafer bonding. The focus of the lecture is on recent studies on a "dry" silanization process for the preparation of quartz fibers for applications as optical sensors and on low-temperature oxidation of aluminum using DBDs in argon-water and argon-oxygen mixtures, respectively.