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P: Fachverband Plasmaphysik

P 19: Poster II

P 19.36: Poster

Donnerstag, 31. März 2022, 16:00–17:30, P

Azimuthal particle transport in high power impulse magnetron sputtering plasmas — •Sascha Thiemann-Monjé, Steffen Schüttler, Julian Held, and Achim von Keudell — Experimental Physics II, Ruhr-University Bochum, 44780 Bochum, Germany

In the past years high power impulse magnetron sputtering (HiPIMS) has become a well established method for depositing high quality hard coatings. Nevertheless, knowledge about the processes inside the discharge is still incomplete. This includes the azimuthal rotation of heavy particles which is induced by the electron Hall-current and is believed to be influenced by rotating ionization zones, the so called 'spokes'.

In this work, optical emission spectroscopy (OES) and x-ray photoelectron spectroscopy (XPS) combined with so called marker targets were used to gain further understanding of the above mentioned particle movement. While OES delivers information about the emitting particles inside the plasma, XPS measurements of substrates placed on the side of the plasma show the contribution of particles leaving the discharge. The measurements where done for circular targets with a diameter of 50 mm and 0.5 Pa Argon as working gas.

It could be shown that the maximum rotation velocity is in the range of 0.5 - 1.8 km/s depending on the measured species. This rotation is as well visible as asymmetric deposition distribution on the side of the discharge.