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P: Fachverband Plasmaphysik

P 2: Low Pressure Plasmas I

P 2.3: Vortrag

Montag, 28. März 2022, 14:30–14:45, P-H11

Operando FTIR monitoring of silicon nanoparticle treatment in a low-pressure plasma — •Oguz Han Asnaz and Jan Benedikt — Institute of Experimental and Applied Physics, Kiel University, Germany

With their unique physical, mechanical, electrical and optical properties, nanoparticles have found a wide range of applications ranging from drug carriers in bio-medicine over catalysts to batteries and solar cells. Control of the particle’s bulk and surface properties is required in many of these applications. In this contribution, we present results for Silicon nanoparticles generated in a capacitively coupled low-pressure plasma. The particles are then confined in a secondary discharge for further treatment with monitoring during operation by means of in situ time-resolved FTIR spectroscopy with a multipass cell for 24 passes. Using different reactive gasses, surface passivation by hydrogen or oxygen treatment as well as deposition of thin carbon films is possible. Additionally, using an electrostatic particle extractor system (EPEX) developed in our group, particle samples are extracted at multiple moments during the treatment for further analysis with negligible disturbance of the plasma system.