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DPG

Mainz 2022 – scientific programme

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P: Fachverband Plasmaphysik

P 2: Low Pressure Plasmas I

Monday, March 28, 2022, 14:00–15:15, P-H11

14:00 P 2.1 Influence of a remote plasma on the chemical vapour deposition of ZrO2 based layers — •Philipp A. Maaß, Vitali Bedarev, Sebastian M. J. Beer, Marina Prenzel, Marc Böke, Anjana Devi, and Achim von Keudell
14:15 P 2.2 High-resolution terahertz spectroscopy with quantum-cascade lasers for atomic oxygen density measurements — •Jente Wubs, Uwe Macherius, Klaus-Dieter Weltmann, and Jean-Pierre van Helden
14:30 P 2.3 Operando FTIR monitoring of silicon nanoparticle treatment in a low-pressure plasma — •Oguz Han Asnaz and Jan Benedikt
14:45 P 2.4 Plasma diagnostics combination: Calorimetric Probe and Retarding Field Analyser — •Felix Schlichting and Holger Kersten
15:00 P 2.5 Selbstkonsistente Modellierung einer linearen Mikrowellenplasmaquelle in einem Magnetfeld — •Stefan Merli, Andreas Schulz, Matthias Walker, Yannick Kathage, Stefan Hanke und Christian Day
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