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Mainz 2022 – scientific programme

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P: Fachverband Plasmaphysik

P 7: Atmospheric Pressure Plasmas I

P 7.1: Talk

Tuesday, March 29, 2022, 14:00–14:15, P-H11

Towards in situ plasma surface interaction studies utilizing a microplasma in a TEM — •Luka Hansen1, Niklas Kohlmann2, Ulrich Schürmann2, Lorenz Kienle2, and Holger Kersten11Institute of Experimental and Applied Physics, Kiel Univeristy, Kiel, Germany — 2Institute for Material Science, Kiel University, Kiel, Germany

The idea of in situ investigating a microplasma in a transmission electron microscope (TEM) was first successfully demonstrated in 2013 [1]. Since then no attempts have been taken to observe the plasma surface interaction in real time. Various technical challenges, e.g. size limitations, gas sealing and handling of high voltages, have to be overcome to enable the in situ imaging.
A stable atmospheric pressure microplasma discharge was developed and studied ex situ in advance to gain insight in the plasma surface interaction by several diagnostics [2]. Prototypes of the vacuum-proof microplasma cell have been build and preparations for the in situ studies are ongoing right now.
In the contribution the microplasma and its vacuum-proof encapsulation is addressed and a report on the current state of the in situ experiments will be given.  
[1] K. Tai et al., 2013 Scientific Reports 3 1325

[2] L. Hansen et al., PSST (Submitted)

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