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Regensburg 2022 – wissenschaftliches Programm

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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 12: Poster 1

CPP 12.73: Poster

Montag, 5. September 2022, 18:00–20:00, P1

Conception and realization of a highly automated physical vapor deposition system for the fabrication of organic light-emitting diodes — •Fabian Binder, Mona Löther, Vladimir Dyakonov, and Andreas Sperlich — Experimental Physics VI, Julius Maximilian University of Würzburg, 97074 Würzburg

Organic light emitting diodes (OLEDs) are most commonly produced in ultra-high vacuum by physical vapor deposition of different organic and metallic layers on a carrier substrate. We designed a production system that should enable an almost completely automated production of the OLED-devices by the use of many sensor solutions and electric stepper motors. The different stepper motors allow a smooth and precise positioning of the OLED-sample above the evaporation crucibles in the vacuum chamber. Being positioned over an evaporation crucible, the sample needs to rotate with a defined speed to achieve an even deposition of the material. In order to vapor-deposit material, a certain, material-specific temperature range is required. This is realized by a software-based temperature controller which manages the evaporation rate according to the specifications of the user. A user interface makes it possible to design the desired OLED layer stack and provides information about the production progress. Finally, the first OLED devices will be produced and an electrical characterization of these devices, such as an investigation on the quantum efficiency will be done.

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