Regensburg 2022 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 11: Focus Session: Quantum Properties at Functional Oxide Interfaces 1 (joint session HL/DS)

DS 11.5: Vortrag

Dienstag, 6. September 2022, 11:30–11:45, H34

Shift of the absoption onset in corundum-like α-(Ti_xGa_1−x)₂O₃ — •Elias Kluth¹, Michael Fay², Christopher Parmenter³, Joseph Roberts⁴, Fabien Massabuau⁵, Rüdiger Goldhahn¹, and Martin Feneberg¹ — ¹Institut für Physik, Otto-von-Guericke-Universität Magdeburg, Germany — ²Advanced Materials Research Group, Faculty of Engineering, University of Nottingham, NG7 2RD, UK — ³Nottingham Nanotechnology and Nanoscience Centre, University of Nottingham, University Park, Nottingham NG7 2RD, UK — ⁴School of Engineering, The University of Liverpool, Liverpool L69 3GH, UK — ⁵Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK

Corundum-like α-Ga₂O₃ is a metastable phase of the polymorphic ultra-wide band gap semiconductor Ga₂O₃. While previous resarch has mostly focused on the stable β-phase the α-phase is less discussed, but interesing as well as it allows bandgap-engineering by alloying e.g. with α-Al₂O₃ (sapphire) or In₂O₃.
Since the transition metal oxide Ti₂O₃ as well, has a corundum-like phase (α-phase), with a small latice mismatch of about 3.5% to α-Ga₂O₃, we investigate here (0001) α-Ga₂O₃ thin films alloyed with Ti, grown by ALD (atomic layer deposition).
We use spectroscopic ellipsometry in ultraviolet range to obtain the complex dielectric function (DF) of α-(Ti_xGa_1−x)₂O₃ up to x=0.61. We find a clear red shift of the absorption onset with increasing Ti content, as well as an increase of the amplitude of the DF.