Regensburg 2022 – scientific programme
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DS: Fachverband Dünne Schichten
DS 20: Poster
DS 20.43: Poster
Wednesday, September 7, 2022, 16:00–18:00, P3
Growth of Crystalline High-Entropy Alloy thin Films by Magnetron Sputtering — •Holger Schwarz1, Thomas Uhlig2, Eric Wong1, Peter Henning1, Guntram Wagner2, and Thomas Seyller1 — 1Institute of Physics, Faculty of Natural Sciences, TU Chemnitz, 09126 Chemnitz, Germany — 2Institute of Materials Science and Engineering, Faculty of Mechanical Engineering, TU Chemnitz, 09126 Chemnitz, Germany
Multicomponent alloys of at least four elements with near equimolar percentage were first reported and investigated by Cantor et al. in 2004 [1] and are nowadays often referred to as High-Entropy Alloys (HEAs) [2]. This group of materials has raised high attention in the field of material research due to its almost infinite possibilities of element combination and resulting physical properties. We demonstrate the fabrication of crystalline HEA thin films on MgO(100) and Al2O3(0001) single crystal substrates from homemade targets via magnetron sputtering. Low electron energy diffraction and X-ray diffraction experiments confirmed the formation of single phase crystalline HEA films. The surface elemental composition is investigated by X-ray photoelectron spectroscopy whereas the bulk stoichiometry is measured by energy dispersive X-ray spectroscopy. Angle resolved photoemission spectroscopy was used to investigate the band structure of the thin films.
[1] B. Cantor, I. Chang, P. Knight, A.Vincent, Mat. Sci. Eng. A, 213-218, 375-377 (2004)
[2] D.B. Miracle, JOM, 2130-2136, 69 (2017)