Regensburg 2022 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 25: Poster 1

HL 25.67: Poster

Mittwoch, 7. September 2022, 18:00–20:00, P2

Investigation of the Correlation between Quantum Dot Density and Photoluminescence Intensity — •Simon Schlombs, Nikolai Spitzer, Nikolai Bart, Andreas Wieck, and Arne Ludwig — Angewandte Festkörperphysik, Ruhr-Universität Bochum, Universitätsstraße 150, D-44780 Bochum

Semiconductor devices based on quantum dots (QDs) require good knowledge of the QD density. Capacitance voltage spectroscopy (C(V)) enables the measurement of buried QDs; however, it requires extensive prior processing of the samples and only allows small areas to be measured. In this work the correlation between QD density and photoluminescence (PL) intensity is investigated. For this purpose, the quantum dot density along a density gradient has been determined and compared to PL measurements. The measured intensity is strongly dependent on the sample structure (absorption, thin-film interference). Because of this the intensity is corrected by an experimentally determined factor. The results allow for an optical determination of the QD density of entire wafers for an arbitrary sample structure.