Regensburg 2022 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 30: Poster 2

HL 30.25: Poster

Donnerstag, 8. September 2022, 11:00–13:00, P3

Characterization of Schottky barrier contacts on a (Mg,Zn)O thin film with lateral composition gradient — •Mauricio Bassallo, Laurenz Thyen, Max Kneiss, Holger von Wenckstern, and Marius Grundmann — Universität Leipzig, Felix-Bloch-Institut für Festkörperphysik, Linnéstraße 5, 04103 Leipzig, Germany

A lateral chemical gradient composition structure based on (Mg,Zn)O is a promising material that allows a spectrally resolved detection of UV photons due to a systematic shift of the absorption edge with the position. In that sense, N different photodetectors, fabricated at different positions of the gradient, would be sensitive to specific photon energies [1]. Due to the challenges of stable p-type (Mg,Zn)O fabrication with high conductivity and mobility, metal-semiconductor-metal (MSM) structures are preferentially chosen for (Mg,Zn)O-based photodetectors [2]. These consist of two small interdigitated coplanar Schottky contacts, which are 10µm wide and 10µm apart and whose simplicity in fabrication makes the MSM structure promising for photodetection. In this contribution the electrical properties of the Schottky contacts in such MSM structures are discussed using the current-voltage measurements. Additionally, the influence of the surface characteristics on the contacts are discussed using Atomic Force Microscopy measurements.

[1] M. Grundmann, IEEE Transact. Electr. Dev. 2019, 66, 470.
[2] S. Liang, H. Sheng, Y. Liu, Z. Hou, Y. Lu, and H. Shen, J. Cryst. Growth 225, 110 (2001).