Regensburg 2022 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

MM: Fachverband Metall- und Materialphysik

MM 35: Nanomaterials: Structure & Properties

MM 35.10: Vortrag

Donnerstag, 8. September 2022, 18:15–18:30, H46

Laterally aligned nanowires: Targeted process design and alignment control — •Jasmin-Clara Bürger, Sebastian Gutsch, and Margit Zacharias — Laboratory for Nanotechnology, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany

For sensors, tin oxide nanowires (NWs) have shown superior properties due to their unique geometry, which allows for high sensitivities. NWs are often grown in freestanding mode for which metallization via standard lithography techniques is not applicable. In the production of single NW-based sensors, a multistep process has to be applied and an individual contacting of the NWs by, e.g., e-beam lithography becomes mandatory. Here, the use of planar NWs, i.e., laterally aligned NWs, is of advantage since the removal step from the growth substrate can be skipped and the NWs can be grown at defined positions. Due to their epitaxial contact with the monocrystalline growth substrate, the NWs are self-aligned towards the substrate lattice. However, the parameter space of these NWs is even smaller than for freestanding NWs. Based on finite element simulation and thermodynamic considerations, we developed a model for the growth of laterally aligned NWs.[1,2] The simulations and theory are supported by experimental results. Following, the preparation of longitudinal TEM lamella of individual NWs and AFM measurements allowed us for nanoscopic insight into the NW alignment on the growth substrate.[2]

[1] J.-C. Bürger et al., Beilstein J. Nanotechnol. (2020), 11, 843-853; [2] J.-C. Bürger et al., Cryst. Growth Des. (2021), 21 (1), 191-199