Regensburg 2022 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 23: Poster Monday: Nanostructures 1
O 23.5: Poster
Montag, 5. September 2022, 18:00–20:00, P4
Helium Ion Microscopy of insulating Materials using Charge Compensation — •Michael Westphal1, Natalie Frese1, Yubo Qi1, Hiroyuki Takei2, Petr Dementyev1, André Beyer1, and Armin Gölzhäuser1 — 1Bielefeld University, Germany — 2Toyo University, Japan
Surface-sensitive imaging capabilities in nanotechnology have become increasingly important in recent years. While scanning electron microscopes (SEM) have become more powerful, they reach their limits when it comes to electrically insulating samples. The accumulation of charge carriers on the sample surface can lead to severe imaging artifacts which necessitates the application of conductive coatings. Helium ion microscopes (HIM) have the possibility to stabilize electric charges by using an electron flood gun to reveal nanoscopic sample features that would otherwise be covered by a conductive coating. In this contribution, we show the benefits of charge-compensated HIM imaging over conventional SEM imaging using the examples of SARS-CoV-2 virus particles [1], carbon nanomembranes from Aromatic Precursors without Headgroups, metal coated SiO2- and carbon micro-spheres [2]. [1] N. Frese et al. , Beilstein Journal of Nanotechnology 12 172-179 (2021). [2] M. Wortmann et al., Journal of Analytical and Applied Pyrolysis Volume 161, January 2022, 105404.