SAMOP 2023 – scientific programme

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Q: Fachverband Quantenoptik und Photonik

Q 7: Poster I

Q 7.13: Poster

Monday, March 6, 2023, 16:30–19:00, Empore Lichthof

Coherent imaging using a high-harmonic source — •Chris Sträche, Jonas Musall, Philip Mosel, Sven Fröhlich, Uwe Morgner, and Milutin Kovacev — Leibniz Universität Hannover, Deutschland, Welfengarten 1, 30167 Hanover

With increasingly smaller structures in the semiconductor industry and biological samples in the nanometer range imaging is becoming a challenging task. According to recently published results a resolution around 16 nm can be achieved using coherent diffraction imaging (CDI) [1]. To enhance the resolution limit higher photon energies, scanning the sample with a well-defined beam and overlapping probe positions (Ptychography) can be used. Here we present diffraction imaging using 13 nm based on high-harmonic generation in a semiinfinite gas cell. A variety of samples ranging from basic resolution targets up to biological samples and electronic circuits are to be characterized. With this setup a resolution below 50 nm is expected to be achieved. Keywords: lensless imaging, high-harmonic generation, coherent diffraction imaging, Pytchography Quellen: [1] Eschen, Wilhelm, et al. "Material-specific high-resolution table-top extreme ultraviolet microscopy." Light: Science & Applications 11.1 (2022): 1-10.