SKM 2023 – wissenschaftliches Programm

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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 29: Interfaces and Thin Films

CPP 29.10: Vortrag

Mittwoch, 29. März 2023, 12:15–12:30, MER 02

In situ GISAXS investigation of sputtering IZO thin film for optoelectronic applications — •Huaying Zhong¹, Lukas V Spanier¹, Christopher R. Everett¹, Xinyu Jiang¹, Shanshan Yin¹, Marlene Sophie Härtel², Jiahuan Zhang², Bertwin Bilgrim Otto Seibertz³, Matthias Schwartzkopf⁴, Stephan V. Roth^4,5, and Peter Müller-Buschbaum^1,6 — ¹TUM School of Natural Sciences, Chair for Functional Materials, Garching, Germany — ²HZB, Solar Energy, Berlin, Germany — ³Department of technology for thin-film components, TU Berlin, Berlin, Germany — ⁴DESY, Hamburg, Germany — ⁵Department of Fibre and Polymer Technology, KTH, Stockholm, Sweden — ⁶MLZ, TUM, Garching, Germany

Transparent conducting oxide (TCO) thin films have been studied intensively for optoelectronic devices, such as photodetectors, photovoltaics and light emitting diodes (LEDs). Among the several TCO thin films, zinc doped indium oxide (IZO) has received much attention as interface layer in optoelectronic devices due to its excellent electrical conductivity, optical transmittance, high thermal/chemical stability, low cost and low deposition temperature. Here, ITO glass and spin coated ZnO on ITO glass are used as the templates for IZO thin film deposition via DC magnetron sputtering technique. The growth dynamics of IZO film on these two templates are respectively investigated via grazing small angle x-ray scattering (GISAXS) characterization, and the morphology and optoelectrical properties of final films are further investigated.