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SKM 2023 – scientific programme

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DS: Fachverband Dünne Schichten

DS 1: 2D Materials and their Heterostructures I: Graphene

DS 1.2: Talk

Monday, March 27, 2023, 09:45–10:00, SCH A 316

Post-processing on graphene field-effect transistors by critical point drying — •Hamid Reza Rasouli1, David Kaiser1, Christof Neumann1, Martha Frey1, Ghazaleh Eshaghi1, Thomas Weimann2, and Andrey Turchanin11Institute of Physical Chemistry, Friedrich Schiller University Jena, 07743 Jena, Germany — 2Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany

We report on a critical point drying (CPD) technique with supercritical carbon dioxide (S-CO2) as a post-processing step to enhance electrical performance of graphene field-effect transistors (GFETs). This technique is promising for integration into the industrial clean rooms environment and demonstrates high potential not only for GFETs but also for other electronic, photonic and optoelectronic devices based on 2D materials.

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