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DS: Fachverband Dünne Schichten

DS 12: Poster

DS 12.46: Poster

Mittwoch, 29. März 2023, 17:00–19:00, P3

Preparation and characterization of Cu-Te phases using focused ion beam — •Nils Braun¹, Vladimir Roddatis², Agnes Mill¹, Sonja Cremer¹, Hagen Bryja¹, Lennart Voss³, Lorenz Kienle³, and Andriy Lotnyk^1,4,5 — ¹Leibniz Institute of Surface Engineering e.V. (IOM) — ²GFZ German Research Centre for Geosciences — ³Institute for Materials Science, Faculty of Engineering, University of Kiel — ⁴Laboratory of Infrared Materials and Devices, The Research Institute of Advanced Technologies, Ningbo University — ⁵College of Physics and Optoelectronic Engineering, Harbin Engineering University

In this work, we prepared different nanoscale Cu-Te phases from Cu - Sb₂Te₃ system using FIB. Copper chalcogenides have shown promising thermoelectric properties, e.g. high efficiency and tunability. Sb₂Te₃ thin layers are epitaxially grown on p-type Si (111) substrates and polycrystalline Sb₂Te₃ thin film are grown on a SiO₂ coated wafer using PLD. A standard cross-section FIB preparation method is used. Samples are investigated using advanced TEM methods and XRD. Dependent on beam current used during FIB lamella preparation and Sb₂Te₃ layer thickness, hole formation in the Cu layer, thickness change and chemical changes of the Sb₂Te₃ layers are observed. In specimen prepared from the heated samples Sb₂Te₃ and Cu-Te grains are found. In polycrystalline Sb₂Te₃ specimen the intercalation of Cu and formation of new Cu-Te phases is observed. We thank P. Hertel for magnetron sputtering. We acknowledge the financial support by the German Research Foundation (DFG 448667535).